Microfabrication and micromachining are terms that describe the technologies and processes used in making microscopic structures or devices. These structures can range in size from the width of a human hair down to smaller than a single human cell. The ability to build devices this small has spurred technological advancements in computers, consumer electronics, green energy technology and many other fields. Microfabrication techniques vary widely depending on the device being built. Main drawbacks for the implementation of BioChips in clinical routine analysis are insufficient reproducibility, lack of standardization as well as expensive chips and detectors. With respect to BioChip production, industrial standards and uniform protocols have not yet been defined. Therefore different BioChip layouts and analytical performance cannot be compared.