Miniaturization through microfabrication and micromachining has revolutionized the world around us. From the modest start of the miniaturization of the meter-sized vacuum tube into a micron sized planar transistor, semiconductor microfabrication has brought about astounding changes to every technological facet of our lives. These microfabrication processes have evolved and been modified into advanced technologies that are pushing the boundaries of resolution, feature sizes and aspect ratios. Similarly polymers have also influenced our life in many ways. However, most of the microfabrication technologies employed in the semiconductor industry are not compatible with the microfabrication of polymers due to thermal, mechanical and chemical properties of polymers.