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Experts in Engineering
M Umit Atalay Nil Uzun Ayse Guliz Bilgin Altinoz M H FERRI ALIABADI Luo Guoqing DR GIULIANOALLEGRI Wasim Orfali PETER BEARMAN Hisham Tolbah Li Lihua Sunil Bhooshan DR PAUL BRUCE Xue Lingyun Daniel E. Acuna Prof. Dr. Ghanshyam Singh Yahya Kemal BAYKAL Li Dujuan Dr. Pradeep Kumar HE CHUN Dr. Rajiv Kumar View MoreBiography
Before joining ASELTA, Patrick was a Senior Research Scientist at the Georgia Tech – CNRS joint lab in Atlanta. He cumulates more than 20 years in leading R&D Laboratories in Microelectronics working in the field of optical metrology and lithography. He authored or co-authored more than 140 publications in conferences and refereed journals and holds 8 patents. Dr Schiavone holds a PhD in Physics from Université Paris 6.
Research Intrest
optical metrology,Microelectronics